Problem svgcoat SNF 2012-10-18 18:03:40: thick resist doesn't come out of nozzle

bchui at snf.stanford.edu bchui at snf.stanford.edu
Fri Jan 11 13:11:37 PST 2013


Tried to run 7um recipe, machine beeps when it gets to the step where the thick resist is supposed to be dispensed.  The recipe does go thru all the steps (spins, etc) but the wafer remains blank at the end



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