Comment svgcoat SNF 2012-10-25 16:03:26: receiver station/track issues

amoini at snf.stanford.edu amoini at snf.stanford.edu
Fri Jan 11 13:11:37 PST 2013


Receiver station didn't go down at first and wafer didn't move to coating chuck. Tried resetting and hitting start several times with no results. Also hit 'wafer lost' on screen and nothing happened. Ended up pushing wafer along track to coating station, then when I reset receiver station and hit start it seemed to work. After 2 of 4 wafers, receiver station came up again! reset, hit start, receiver station went down and immediately came back up! Emptied the first 2 wafers, tried again, receiver station went down. Wafer also got stalled moving to hot plate as a separate issue from receiver station.



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