Problem svgcoat SNF 2012-11-18 15:22:11: EBR became unpredictable

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Jan 11 13:11:37 PST 2013


I've ran Several of our dummy wafers cleaned them and tested them
Using Several Recipes, EBR is at 2mm On everyone of them, I couldnt repeat the User problem , All Operations Are Ok, Good to use. 



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