Problem svgcoat SNF 2012-12-03 14:53:12: 5mm EBR is very poor

karthikv at karthikv at
Fri Jan 11 13:11:37 PST 2013

Ran 5 blank oxide coated wafers using 1.6 um 3612, 5 mm EBR. The EBR edge was very poor and depth in some cases was larger than 5 mm

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