resist streaks

Matt Hopcroft hopcroft at snf.stanford.edu
Thu Aug 17 14:30:36 PDT 2000


Hello,

	I have been experiencing recurring problems with streaks and
bubbles in the 3612 resist. The streaks don't seem to be related to any
topographical feature on the wafer, or any visible contamination.

	Has anybody else had similar problems? Can anybody suggest a
cleaning procedure, or other possible solution? Thank you,

-Matt


Matt Hopcroft
hopcroft at snf.stanford.edu




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