From mahnaz at snf.stanford.edu Mon Apr 9 16:09:40 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Mon, 09 Apr 2001 16:09:40 -0700 Subject: Warning prog changed Message-ID: <3AD24134.136D5BC8@snf.stanford.edu> Hello all, The key pad on the svg coater (the coater and pre bake panel) gone mad and no mater what you do or try to tell it will not follow but of course is "mad". All morning and this afternoon it beeped with out any one even touching it. warning, prog #7 has no wash in it and I can not add any time to the recipe. The track automatically goes to cycle purge and would not stop on 20 purge it keeps purging. Do not turn off and turn on too many times that will cause other problems. Some one has to shut the second key pad tonight, I do not want the system go to purge and waste all the resist. I mean just turned it of from the panel. Mario ordered the key pad and he will pick it up tomorrow morning. I am hoping to be in business before lunch. mahnaz From mahnaz at snf.stanford.edu Tue Apr 10 11:54:05 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Tue, 10 Apr 2001 11:54:05 -0700 Subject: up Message-ID: <3AD356CD.2C75FD6@snf.stanford.edu> Hello all, The track is back up and the key pad has been replaced with a brand new key pad by Mario. Please do not use any tweezers or pen to change or edit the program, only fingers. We paid a hefty price for it. Make sure to thank mario as he put a lot of effort to pick up the part and all of that. 220 resist which gives the 7 and 10 Um thickness still is down due to pump problem. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at snf.stanford.edu Fri Apr 20 16:27:24 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Fri, 20 Apr 2001 16:27:24 -0700 Subject: temp.change Message-ID: <3AE0C5DC.63A0FEAD@snf.stanford.edu> Hello all, The humidity is going up and temp. dropping in the lithography area, I strongly suggest do not spin any resist and do not use the ultratech. If you are resolving big geometry you are most likely ok. Nikon has environmental chamber so you should be ok for now. Dick has send out a message earlier, this was not an schedule down time. mahnaz From ejwong at stanford.edu Tue Apr 24 04:27:30 2001 From: ejwong at stanford.edu (ejwong at stanford.edu) Date: Tue, 24 Apr 2001 04:27:30 -0700 (PDT) Subject: Misplaced Mask In-Reply-To: <3AE0C5DC.63A0FEAD@snf.stanford.edu> Message-ID: Hello all, I seemed to have misplaced my mask late last night (Monday) and cannot find it around the fab. If anyone accidentally took it, or runs across it, could you email me? It's labeled: bridges_v1 EtchBridge E. Wong Thanks! Eehern ejwong at stanford.edu