temp.change

Mahnaz Mansourpour mahnaz at snf.stanford.edu
Fri Apr 20 16:27:24 PDT 2001


Hello all,

The humidity is going up and temp. dropping in the lithography area, I
strongly suggest do not spin any resist and do not use the ultratech. If
you are resolving big  geometry you are most likely ok.
Nikon has environmental chamber so you should be  ok for now. Dick has
send out a message earlier, this was not an schedule down time.

    mahnaz




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