From martinez at snf.stanford.edu Mon Oct 1 21:16:18 2001 From: martinez at snf.stanford.edu (Mike Martinez) Date: Mon, 01 Oct 2001 21:16:18 -0700 Subject: edge bead removal Message-ID: <3BB93F92.41850361@snf.stanford.edu> ebr is set up and working fine for programs #7 & #8. program #4 (thick resist) needs a little more attention so we will be working on this problem tomorrow 10/2 from 2:00 to 4:00 PM. From song_pang at yahoo.com Mon Oct 1 23:20:28 2001 From: song_pang at yahoo.com (Song Pang) Date: Mon, 1 Oct 2001 23:20:28 -0700 (PDT) Subject: edge bead removal In-Reply-To: <3BB93F92.41850361@snf.stanford.edu> Message-ID: <20011002062028.22279.qmail@web20509.mail.yahoo.com> Mike, Could you please double check program 8 (1.6 um PR) as well. I do see a little bit back splash on my wafers (on and off). Thanks. Song --- Mike Martinez wrote: > ebr is set up and working fine for programs #7 & > #8. program #4 (thick > resist) needs a little more attention so we > will be working on this problem tomorrow 10/2 from > 2:00 to 4:00 PM. > > __________________________________________________ Do You Yahoo!? Listen to your Yahoo! Mail messages from any phone. http://phone.yahoo.com From beckwith at snf.stanford.edu Tue Oct 2 09:09:12 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Tue, 2 Oct 2001 09:09:12 -0700 Subject: edge bead removal In-Reply-To: <20011002062028.22279.qmail@web20509.mail.yahoo.com> References: <20011002062028.22279.qmail@web20509.mail.yahoo.com> Message-ID: At 11:20 PM -0700 10/1/01, Song Pang wrote: >Mike, > >Could you please double check program 8 (1.6 um PR) as >well. I do see a little bit back splash on my wafers >(on and off). Thanks. > >Song > >--- Mike Martinez wrote: >> ebr is set up and working fine for programs #7 & >> #8. program #4 (thick >> resist) needs a little more attention so we >> will be working on this problem tomorrow 10/2 from > > 2:00 to 4:00 PM. Mike: Could you do this in the morning? I will be re-coating my wafers this morning because of the splash back problem last night. Thanks. Sharleen From martinez at snf.stanford.edu Tue Oct 2 19:21:06 2001 From: martinez at snf.stanford.edu (Mike Martinez) Date: Tue, 02 Oct 2001 19:21:06 -0700 Subject: Important!! Message-ID: <3BBA7612.68C2E5D2@snf.stanford.edu> top and bottom ebr system is in place and working properly for programs #4, #7, #8. PLEASE do not change any program parameters. PLEASE do not power cycle the coater module for any reason. constant power cycling has ruined the coater CPU PCB. it no longer retains recipe information after being turned off. From beckwith at snf.stanford.edu Wed Oct 3 09:08:48 2001 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Wed, 3 Oct 2001 09:08:48 -0700 Subject: Important!! In-Reply-To: <3BBA7612.68C2E5D2@snf.stanford.edu> References: <3BBA7612.68C2E5D2@snf.stanford.edu> Message-ID: At 7:21 PM -0700 10/2/01, Mike Martinez wrote: >top and bottom ebr system is in place and working properly for programs >#4, #7, #8. >PLEASE do not change any program parameters. >PLEASE do not power cycle the coater module for any reason. >constant power cycling has ruined the coater CPU PCB. it no longer >retains recipe information after being turned off. Mike: Then please train users to NOT rip their wafers off of various stations...this is how the machine gets in a mode that is basically unrecoverable without power cycling. They need to let the machine finish its complete cycle before removing wafers and cassettes. Sharleen From mahnaz at snf.stanford.edu Wed Oct 3 18:15:19 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Wed, 03 Oct 2001 18:15:19 -0700 Subject: Prime is down Message-ID: <3BBBB827.2C35DB1A@snf.stanford.edu> Hello all, One wafer has been broken on the prime station, I vacuumed and cleaned but realized that the whole adjustment is out. Do not try to use it at all. For the EBR the vendor worked on that all afternoon and we decided that to discontinue the top EBR for now. The CPU is totally acting up and the part has been ordered till then do not turn the system off as it would erase all the recipe or it will change some part of the recipe. I am tired and hoping that tomorrow will be a better day for all of us and I am truly sorry for the disruption all of these causing to your work. mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at snf.stanford.edu Mon Oct 8 14:27:07 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Mon, 08 Oct 2001 14:27:07 -0700 Subject: update Message-ID: <3BC21A2A.593B4C33@snf.stanford.edu> Hello all, The CPU on the coater has been changed and upgraded. the EBR nozzle is changed and the new one is installed and working beautifully. I ran some wafers at 11:30 and... "perfect". Please do not adjust or even touch any of the nozzles as the adjustment is a tidies and time consuming task. Do not turn off the system unless absolutely is necessary and let us know of the problem and we will do our best to fix it. Thank you for your cooperation mahnaz From mahnaz at snf.stanford.edu Mon Oct 8 16:55:26 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Mon, 08 Oct 2001 16:55:26 -0700 Subject: update Message-ID: <3BC23CEE.E80DC525@snf.stanford.edu> hello again, I update the recipe 7,8, and 2 please don't change or modify these recipes. Now with the new top EBR you either get the top and bottom EBR or you do not get it at all. There is no only bottom EBR option. I did up grade the sheet and a new copy is in the lab tomorrow I will put the laminated version in there. mahnaz From true at snf.stanford.edu Mon Oct 8 19:41:34 2001 From: true at snf.stanford.edu (Randy True) Date: Mon, 08 Oct 2001 19:41:34 -0700 Subject: problem with program#4 References: <3BC23CEE.E80DC525@snf.stanford.edu> Message-ID: <3BC263DE.682798A8@snf.stanford.edu> I had a problem with program 4 tonight (the 7um SPR-220 program). It is not dispensing directly in the center of the wafer, causing a defect there. I also noticed a lot of particles after coating (wafers were new and clean) even though I did swab the nozzle between every wafer. --Randy True true at snf From mahnaz at snf.stanford.edu Tue Oct 9 16:35:50 2001 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Tue, 09 Oct 2001 16:35:50 -0700 Subject: Problem svgcoat 2001-10-08 17:24:48: severe backsplashing on prog. 8 Message-ID: <3BC389D6.72BCA9E9@snf.stanford.edu> Hello all, To day we worked on the SVG coater and all the resist lines are changed and everything that can possibly be changed or corrected is fixed. On program 220-7 resist or program 4 we added the automatic pre dispense So when you start the recipe automatically dispense once. Still run a dummy. Do Not modify or change any thing that you are not suppose to do. In other word I am asking for a break for Mario and I. mahnaz From wada at stanford.edu Wed Oct 10 19:11:21 2001 From: wada at stanford.edu (Hiroyuki Wada) Date: Wed, 10 Oct 2001 19:11:21 -0700 Subject: Broken wafer In-Reply-To: <3BC389D6.72BCA9E9@snf.stanford.edu> References: <3BC389D6.72BCA9E9@snf.stanford.edu> Message-ID: <20011010185310.708D.WADA@stanford.edu> Hi The vacuum in the prime oven didn't work this evening. Someone leaves many pieces of a broken wafer. I cleaned them and it worked. I think it should be checked when the vacuum doesn't work... Thank you, Hiroyuki From martinez at snf.stanford.edu Thu Oct 18 17:54:22 2001 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 18 Oct 2001 17:54:22 -0700 Subject: reminder Message-ID: <3BCF79BE.90DECBD@snf.stanford.edu> just a quick reminder that program parameters on programs #4, #7, and #8 are NOT to be changed by the user on the svg coater. programs #3, and #5 are available for user defined resist dispensing, spin speed, bake cycle, etc. -------------- next part -------------- An HTML attachment was scrubbed... URL: