edge bead removal

Song Pang song_pang at yahoo.com
Mon Oct 1 23:20:28 PDT 2001


Could you please double check program 8 (1.6 um PR) as
well.  I do see a little bit back splash on my wafers
(on and off).  Thanks.


--- Mike Martinez <martinez at snf.stanford.edu> wrote:
> ebr is set up and working fine for programs  #7 &
> #8. program #4 (thick
> resist) needs a little more attention so we
> will be working on this problem tomorrow 10/2  from
> 2:00 to 4:00 PM.

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