edge bead removal

Sharleen Beckwith beckwith at snf.stanford.edu
Tue Oct 2 09:09:12 PDT 2001

At 11:20 PM -0700 10/1/01, Song Pang wrote:
>Could you please double check program 8 (1.6 um PR) as
>well.  I do see a little bit back splash on my wafers
>(on and off).  Thanks.
>--- Mike Martinez <martinez at snf.stanford.edu> wrote:
>>  ebr is set up and working fine for programs  #7 &
>>  #8. program #4 (thick
>>  resist) needs a little more attention so we
>>  will be working on this problem tomorrow 10/2  from
>  > 2:00 to 4:00 PM.


Could you do this in the morning? I will be re-coating my wafers this 
morning because of the splash back problem last night.



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