beckwith at snf.stanford.edu
Wed Oct 3 09:08:48 PDT 2001
At 7:21 PM -0700 10/2/01, Mike Martinez wrote:
>top and bottom ebr system is in place and working properly for programs
>#4, #7, #8.
>PLEASE do not change any program parameters.
>PLEASE do not power cycle the coater module for any reason.
>constant power cycling has ruined the coater CPU PCB. it no longer
>retains recipe information after being turned off.
Then please train users to NOT rip their wafers off of various
stations...this is how the machine gets in a mode that is basically
unrecoverable without power cycling. They need to let the machine
finish its complete cycle before removing wafers and cassettes.
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