mahnaz at snf.stanford.edu
Mon Oct 8 14:27:07 PDT 2001
The CPU on the coater has been changed and upgraded. the EBR nozzle is
changed and the new one is installed and working beautifully. I ran some
wafers at 11:30 and... "perfect".
Please do not adjust or even touch any of the nozzles as the adjustment
is a tidies and time consuming task.
Do not turn off the system unless absolutely is necessary and let us
know of the problem and we will do our best to fix it.
Thank you for your cooperation
More information about the svgcoat