problem with program#4

Randy True true at snf.stanford.edu
Mon Oct 8 19:41:34 PDT 2001


I had a problem with program 4 tonight (the 7um SPR-220 program). It is not
dispensing directly in the center of the wafer, causing a defect there. I
also noticed a lot of particles after coating (wafers were new and clean)
even though I did swab the nozzle between every wafer.

--Randy True
true at snf




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