From martinez at snf.stanford.edu  Mon Sep 10 12:56:27 2001
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Mon, 10 Sep 2001 12:56:27 -0700
Subject: ready for use
Message-ID: <3B9D1AEB.8B06810D@snf.stanford.edu>

cleaned broken wafer from vp chamber, removed several layers of vacuum
grease from vp chamber and lid, aligned wafer rails and and lid. cycled
test wafers.




From martinez at snf.stanford.edu  Mon Sep 17 21:18:24 2001
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Mon, 17 Sep 2001 21:18:24 -0700
Subject: spindle
Message-ID: <3BA6CB0F.1F78D416@snf.stanford.edu>

replaced spindle and catch cup assembly. calibrated spindle to 9.7 krpm.
cycled test wafers and found
new bearings are a bit noisy but that shouldn't be a problem. spindle
speed deviation remains in the +/- 1% range.




From martinez at snf.stanford.edu  Tue Sep 25 13:12:17 2001
From: martinez at snf.stanford.edu (Mike Martinez)
Date: Tue, 25 Sep 2001 13:12:17 -0700
Subject: vapor prime
Message-ID: <3BB0E521.783757AE@snf.stanford.edu>

we have adjusted the vapor prime air cylinder and vp lid for best
contact alignment.
the EBR nozzle has been replaced and flow and tank pressure adjusted.
test wafers looked good.
ready for use.