Mike Martinez martinez at snf.stanford.edu
Mon Sep 17 21:18:24 PDT 2001

replaced spindle and catch cup assembly. calibrated spindle to 9.7 krpm.
cycled test wafers and found
new bearings are a bit noisy but that shouldn't be a problem. spindle
speed deviation remains in the +/- 1% range.

More information about the svgcoat mailing list