Resolution? Re: Suggestion RE: Photoresist lifting problems

Mohammed H. Badi mbadi at
Fri Jan 11 18:44:12 PST 2002

Hello all,
  I was wondering if the resist adhesion problem was resovled today (Friday).
I would like to do some processing this weekend but I obviously would like to
avoid any delamination problems.
  If you know anything, please do let me know (but don't email the whole list
-- we don't want to fill up everyone's mailbox).  I'll post a message with
the responses once I hear back from people.

mbadi at snf

On Fri, 11 Jan 2002, Sharleen Beckwith wrote:

> On Jan 10, 2002 6:50:18 PM Pascal (pzwahlen at said:
> >Many users have experienced PR delamination during the development 
> >for wafers coated on Thursday Jan 10th. Problem could come from a 
> >bad lot of PR or bad temperature and humidity in the cleanroom.
> >Wafers that I coated on Tuesday night, had no problem during 
> >development but very bad delamination during wet etching (BOE). In 
> >this case I was thinking that the problem might rather come from bad 
> >HMDS priming. I should have more results to discuss about tomorrow 
> >evening. You can contact me for more inputs then.
> This is not the first time we have had this sort of problem. In the 
> future I think it would benefit us all if at the first sign of 
> lifting resist (at etch, or at svgdev) the person who has the problem 
> immediately sends a message to: svgcoat at This way we 
> would all be alerted to watch out. I think we should start using 
> these equipment user addresses as a forum on equipment issues. Most 
> people do not get the shutdown and problem messages sent through 
> coral, and it appears we cannot count on staff to send out messages 
> of this sort.
> This message would also short cut the "it must be a problem with your 
> wafers" response we all get. We could save ourselves hours of time 
> trying to figure out what we did wrong with our processing when, in 
> fact, it is an equipment problem.
> You can count the time spent composing and sending the message as 
> "community service" : )
> Let me know what you all think about this (I am glad my resist lifted 
> at svgdev and not in the BOE tank!).
> Sharleen


Mohammed H. Badi		I'm just sipping on chamomile.

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