Coater Problem Resolved

Mohammed H. Badi mbadi at relgyro.stanford.edu
Fri Jan 11 20:42:44 PST 2002


Thanks to everyone who wrote back.  The delamination problem is indeed fixed
-- the problem was that the HMDS tank was empty.  People did warn about
getting an even coat for 7um resist coverage, though.

moe.

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Mohammed H. Badi		I'm just sipping on chamomile.
650-906-0663




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