coater 1 problem

Sanli Ergun sanli at piezo.Stanford.EDU
Mon Jan 21 12:39:09 PST 2002


Today, I used track one of svgcoat, but the lithography didn't work. The
resist peeled of. There may be HMDS problem again.

________________________________________________________
Arif Sanli Ergun
Engineering Research Associate
E. L. Ginzton Laboratory,
Room : 130,
Stanford University,
Stanford, CA, 94305-4085
Phone: (650) 723-8447
Fax  : (650) 725-7509
www  : http://piezo.stanford.edu/group/IRP/sanliIRP.html




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