coater 1 problem

Sanli Ergun sanli at piezo.Stanford.EDU
Mon Jan 21 12:39:09 PST 2002

Today, I used track one of svgcoat, but the lithography didn't work. The
resist peeled of. There may be HMDS problem again.

Arif Sanli Ergun
Engineering Research Associate
E. L. Ginzton Laboratory,
Room : 130,
Stanford University,
Stanford, CA, 94305-4085
Phone: (650) 723-8447
Fax  : (650) 725-7509
www  :

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