track 2

Mike Martinez martinez at snf.stanford.edu
Wed Jan 23 09:30:22 PST 2002


Lab users please note,

SVGCOAT2 is not quite ready for use. An additional delay has been
introduced by a user who damaged the wafer chuck and broke a pin on the
wafer tranfer motor. A new motor will need to be ordered, installed, and
tested. Please wait until the shut down status has been removed in coral
before using this track.






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