From beckwith at snf.stanford.edu Wed Mar 6 16:17:50 2002 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Wed, 6 Mar 2002 16:17:50 -0800 (PST) Subject: Comment svgcoat 2002-03-06 14:26:45: bad pump (fwd) Message-ID: Just so everyone knows, and they don't waste their time as I and three other people just did: ---------- Forwarded message ---------- Date: Mar 6, 2002 2:26:46 PM From: martinez at snf.stanford.edu To: svgcoat-pcs at snf.stanford.edu Subject: Comment svgcoat 2002-03-06 14:26:45: bad pump the resist recovery valve (suck back) on the 3612 resist pump is broken. part needs to be ordered. down time ~ 3 days SPR220-7 ok to use. From martinez at snf.stanford.edu Thu Mar 7 11:15:45 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 07 Mar 2002 11:15:45 -0800 Subject: [Fwd: Problem svgcoat 2002-03-06 16:12:30: 3612 resist coverage awkward] Message-ID: <3C87BC60.3836225C@snf.stanford.edu> -------------- next part -------------- An embedded message was scrubbed... From: vilanova at snf.stanford.edu Subject: Re: Problem svgcoat 2002-03-06 16:12:30: 3612 resist coverage awkward Date: Mar 7, 2002 11:10:23 AM Size: 931 URL: From mahnaz at snf.stanford.edu Thu Mar 7 11:58:41 2002 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Thu, 07 Mar 2002 11:58:41 -0800 Subject: UP date Message-ID: <3C87C671.DE34C7AC@snf.stanford.edu> Hello folks, I am not sure how to say this, You have no business to adjust any thing on the pump, canister (EBR, HMDS) or any thing from underneath the track. We need to break this vicious cycle of trying to fix things that in the first place should have not been touched. Mike, Mario and I are the only one. I am very frustrated at this moment. Secondly: No ONE IS allowed to use the PRIME hot plate in MANUAL mode on the tracks, use the YES prime oven. If I see that, consider your name taken off for a month. mahnaz From martinez at snf.stanford.edu Thu Mar 7 15:43:53 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Thu, 07 Mar 2002 15:43:53 -0800 Subject: r.i.p. Message-ID: <3C87FB39.21E23034@snf.stanford.edu> ultratech x-y stage laser transducer is dead and needs to be replaced. down time unknown. will send update asap From beckwith at snf.stanford.edu Tue Mar 26 17:46:41 2002 From: beckwith at snf.stanford.edu (Sharleen Beckwith) Date: Tue, 26 Mar 2002 17:46:41 -0800 (PST) Subject: Program 8 EBR problem Message-ID: If you want to use program 8 be aware that sometimes the arm doesn't go all the way over to the wafer edge so the edge bead is not removed. Sometimes it works, sometimes it doesn't. (Mike & Mario: we just figured out what is happening). Sharleen