Program 8 EBR problem

Sharleen Beckwith beckwith at snf.stanford.edu
Tue Mar 26 17:46:41 PST 2002


If you want to use program 8 be aware that sometimes the arm
doesn't go all the way over to the wafer edge so the edge bead is not
removed. Sometimes it works, sometimes it doesn't.

(Mike & Mario: we just figured out what is happening).

Sharleen




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