From mahnaz at snf.stanford.edu  Thu May  2 15:56:58 2002
From: mahnaz at snf.stanford.edu (Mahnaz)
Date: Thu, 02 May 2002 15:56:58 -0700
Subject: Kind Reminder
Message-ID: <3CD1C43A.9651FFB4@snf.stanford.edu>


Hello all,

Just a kind reminder, that both SVG tracks will go to shut down at 8 am.
I will send out an email when we are down.

mahnaz



From mahnaz at snf.stanford.edu  Thu May  9 11:20:08 2002
From: mahnaz at snf.stanford.edu (Mahnaz)
Date: Thu, 09 May 2002 11:20:08 -0700
Subject: up date
Message-ID: <3CDABDD8.CF0D0233@snf.stanford.edu>


Hello all,

I am pleased to let you know that the sensor up grade on both svg track
has gone through very successfully and now you can run glass and quartz
wafers exactly like silicon wafers the SVGdev  has gone through the same
up grade as well.
The new sensor is Fairchild air sensor and when the wafer passes through
it signals a back pressure and sense a small voltage.

I am also optimizing the 3617M resist for glass and quartz and looking
very good.  I was able to resolve 1 um line on glass substrate.

mahnaz




From mtang at snf.stanford.edu  Thu May  9 16:03:39 2002
From: mtang at snf.stanford.edu (Mary Tang)
Date: Thu, 09 May 2002 16:03:39 -0700
Subject: Advance Notice:  Visiting Class
Message-ID: <3CDB004B.2DD20CAB@snf.stanford.edu>

Hi all --

We are hosting three lab sessions for students in the EE17Q class.  As
you may have noticed, I've reserved svgcoat, svgdev2, karlsuss, and
evalign for the following times:

Tuesday, May 14:  3:30-5:30 (7 students)
Wednesday, May 15:  4:00-6:00 (4 students)
Thursday, May 16:  3:30-5:30 (4 students)

We will be just coating, exposing and developing a few wafers, so we are
not likely to take up this whole period of time, nor are we likely going
to need all the equipment.  But I just wanted to give you advance
warning, and to let you know that availability of this equipment during
these times will be subject to how well this class lab goes.

Any questions, contact me, Sharleen Beckwith, or Mahnaz Mansourpour.

Thanks,

Mary

--
Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at snf.stanford.edu




From mahnaz at snf.stanford.edu  Fri May 24 12:07:17 2002
From: mahnaz at snf.stanford.edu (Mahnaz)
Date: Fri, 24 May 2002 12:07:17 -0700
Subject: Not Allowed
Message-ID: <3CEE8F65.6FF98DDB@snf.stanford.edu>


To all,

I like to remind all of you that, we do not allow any DISPENSE of LOL
2000, any kind of POLYIMIDE,   PMMA 950K --->9% and 495K---> 9% on
either SVG tracks. This is very damaging to the system and every ones
process.
If I come across it I will remove individuals name for a whole month
with out any hesitation at all. If there is a process issue, I am open
to discuss the matter.

mahnaz