From martinez at snf.stanford.edu Wed Sep 11 15:05:44 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 11 Sep 2002 15:05:44 -0700 Subject: reminder Message-ID: <3D7FBE37.AB734AB7@snf.stanford.edu> Folks, please remember.. make no changes to any arm programs or any of the coat programs. The exception is program # 5. and if arm program 7 for ebr is not giving you the promised 5mm removal, do NOT force the ebr nozzle into position. simply call your friendly neighborhood maintenance guy. Mike From mahnaz at snf.stanford.edu Thu Sep 12 14:10:37 2002 From: mahnaz at snf.stanford.edu (Mahnaz) Date: Thu, 12 Sep 2002 14:10:37 -0700 Subject: unacceptable Message-ID: <3D8102CD.E35036D9@snf.stanford.edu> Hello all, I have few complain to make: On the YES oven: I found one cassette loaded with si dust or something similar The second cassette missing, I looked in to all the teflon cassette and is not there. These cassettes have two brown dot and you are not allowed to remove them from yes oven. Bring it back ASAP. On the SVG coater I created the ARM 7 (5mm) to replace the ARM 6 ( the standard, 2.5 mm) and that is all you need to do . In the recipe where it says arm, 6: to change, press 7 and push arm. You are not allowed to go to ARM program and change things. You are not allowed to adjust( push back and forth the arm ) that causes many damage to the equipment. See Mike or Mario if you need help. Two people works was effected. This cycle has to come to end or I simply will take the KEYS away mahnaz -------------- next part -------------- An HTML attachment was scrubbed... URL: From martinez at snf.stanford.edu Wed Sep 18 14:42:05 2002 From: martinez at snf.stanford.edu (Mike Martinez) Date: Wed, 18 Sep 2002 14:42:05 -0700 Subject: poor vac Message-ID: <3D88F32D.36885BF6@snf.stanford.edu> found hardened pmma on spin chuck which caused a poor vacuum seal to the wafer. pmma users please be sure to clean the chuck after use.