Photoresist as dielectric layer?
Pradeep K. Nataraj
pnataraj at kovio.com
Mon Feb 16 11:50:05 PST 2004
I am trying to figure out if any one of you has experience using
photoresist (AZ3612/SPR220) as gate dielectric?
I am trying to probe(C-V) the oxide layer (I don't want just to put Al
or any metal and probe through it).
I would like to use photoresist as protective/dielectric layer between
the metal and oxide layer.
I would appreciate for sharing any knowledge regarding this matter.
Thank you for your time.
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