From Spotworthy at aol.com  Mon Jan 26 09:59:10 2004
From: Spotworthy at aol.com (Spotworthy at aol.com)
Date: Mon, 26 Jan 2004 12:59:10 -0500
Subject: Fwd: 220-3 thickness measurements
Message-ID: <627CCB59.1FA7F4CF.0CEC25E7@aol.com>

Resist spun on SVGCOAT2.
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From: Spotworthy at aol.com
Subject: 220-3 thickness measurements
Date: Mon, 26 Jan 2004 12:53:16 -0500
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From Spotworthy at aol.com  Mon Jan 26 13:14:33 2004
From: Spotworthy at aol.com (Spotworthy at aol.com)
Date: Mon, 26 Jan 2004 16:14:33 -0500
Subject: Fwd: 220-3 thickness measurements
Message-ID: <17AABC10.14A64FF1.0CEC25E7@aol.com>

Just to verify, the target thickness for 220-3 at 6000 rpm is 2um. The actual measurements were quite close.

Linda W.
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From mahnaz at snf.stanford.edu  Wed Jan 28 16:31:09 2004
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Wed, 28 Jan 2004 16:31:09 -0800
Subject: up date
Message-ID: <4018544D.9417E854@snf.stanford.edu>


Hello all,

This email should have been send out yesterday, but I did not get the
correct pass down and this morning before I  know it, I was involve with
too many other things so my apology to all of you.

UTS worked more on the SVG track1  ( 7 um resist) and tomorrow will be
more work done and I am assured will be the last day.

What happened the pump was not working before holiday  and we had a very
nonuniform resist although we replaced the pump, controller and the
spindle we did not see any improvement.
Meanwhile I had requested for a bigger line to be put in ( to get more
flow) and that is causing some issues with non uniformity. We will
change the line back to original size and change some of the tubing
tomorrow.
I am hoping to have the 7 um resist ( 220-7) up and running by the
afternoon.
Thank you for your patient

mahnaz