From mahnaz at snf.stanford.edu Tue Mar 9 14:16:03 2004 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Tue, 09 Mar 2004 14:16:03 -0800 Subject: 220-7 resist Message-ID: <404E4223.D1BB1820@snf.stanford.edu> Hello all, I like to let you know that finally we resolved the issue with 7 and 10 um resist. The uniformity looks good and thickness across the wafers are within the spec ( less than %2 ). with thick resist, you need to clean the nozzle with q-tip and run at least 3 dummies. The recipe has changed some what so follow the procedure sheet next to the track, forget about the old recipe from your note book. We have changed the pump, controller and few other items. Many hours of work has gone in to this, thanks for your patience. Please if you notice any problem or issues lets know immediately. We all need to thank Mike, Mario and Colby. mahnaz From vilanova at snf.stanford.edu Wed Mar 31 13:55:13 2004 From: vilanova at snf.stanford.edu (eddy) Date: Wed, 31 Mar 2004 13:55:13 -0800 Subject: HOT PLATES & OVENS MONTHLY CALIBRATION Message-ID: <406B3E40.3F4A25BC@snf.stanford.edu> The followings are the before and after ovens & hotplates temperature readings OVENS 150' SINGE = 149.1 110' POST BAKE = 112 90' PRE-BAKE = 89.3 COATER HOT PLATES COAT 1 HMDS 125 = 123.5 POST BAKE HOTPLATE 90' = 90'1 COAT 2 HMDS 125 = 124.0 POST BAKE HOTPLATE 90' = 89.1 DEVELOPER HOTPLATES DEVELOPER 1 - 110 = 110'6 DEVELOPER 2 - 110 = 108.3 ************************************************************ 90'C HOTPLATE = 90.4 'C 150'C HOTPLATE = 114.3'C ************************************************************ HOTPLATES NEXT TO LAUREL SPINNER LEFT HOTPLATE = 39'C = 40.2'C RIGHT HOTPLATE =38'C = 38.3'C ************************************************************* HOTPLATES NEXT TO HEADWAY SPINNER LEFT HOTPLATE = 42'C = 41.1'C RIGHT HOTPLATE = 35'C = 35.6'C -------------- next part -------------- An HTML attachment was scrubbed... URL: