From Vilanova at snf.stanford.edu Thu Nov 17 10:49:05 2005 From: Vilanova at snf.stanford.edu (Eddy VIlanova) Date: Thu, 17 Nov 2005 10:49:05 -0800 Subject: Commets on wafers ( marks or lines ) Message-ID: <437CD0A1.6060400@snf.stanford.edu> If you see commets on your wafers On track 2 and 1 is because when you change the resist bottle you have to make sure the dispense hose that goes in the bottle is all the way in ( if not you will see a lot of bubbles in the dispense line ) , after that you have to purge the line and clean the dispense nozzle , I've cleaned the nozzle , purged line, ( programs # 7 & 8 ) ( track2 ) cycled wafers , ok to use.