Commets on wafers ( marks or lines )

Eddy VIlanova Vilanova at snf.stanford.edu
Thu Nov 17 10:49:05 PST 2005


If you see commets on your wafers On track 2 and 1  is because when you 
change the resist bottle you have to make sure the dispense hose that 
goes in the bottle is all the way in ( if not you will see a lot of 
bubbles in the dispense line ) , after that you have to purge the line 
and clean the dispense nozzle , I've cleaned the nozzle  , purged line,  
( programs # 7 & 8 ) ( track2 )  cycled wafers , ok to use.




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