Commets on wafers ( marks or lines )
Eddy VIlanova
Vilanova at snf.stanford.edu
Thu Nov 17 10:49:05 PST 2005
If you see commets on your wafers On track 2 and 1 is because when you
change the resist bottle you have to make sure the dispense hose that
goes in the bottle is all the way in ( if not you will see a lot of
bubbles in the dispense line ) , after that you have to purge the line
and clean the dispense nozzle , I've cleaned the nozzle , purged line,
( programs # 7 & 8 ) ( track2 ) cycled wafers , ok to use.
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