mahnaz at stanford.edu
Thu Apr 27 16:14:26 PDT 2006
The SVG track is shut down for bad CPU board that controls the HMDS hot
plate temp and the indexer. The part will be in tomorrow around 10 am
and I am confidant that we will be up by afternoon. The 3612
1 um and 1.6 um is on the svgtrack2 so it should not be any issues
there. The only issue will be no 7 or 10 um resist capability till tomorrow.
Mario was going to take tomorrow off but he is changing his plan and
will come in to expedite the work.
More information about the svgcoat