planarizing film

Ahmet Tura tura at
Wed Feb 15 15:59:18 PST 2006

I need a spin-on planarizing film (organic, dielectric, or otherwise) 
to planarize pillars that are ~0.5um tall and ~0.2um wide. I found out 
that the standard photoresists used at SNF are not quite suitable for 
this type of application. I was wondering if anyone has used anything 
similar at SNF, or could guide me on what to use.

Any help would be appreciated. Thank you,

Ahmet Tura
tura at

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