one wafer per slot
mahnaz at stanford.edu
Fri Apr 25 08:41:44 PDT 2008
Here I am forwarding an email from a labmember to you all....
Can some one explain this to me?
You wouldn't believe this.
I just opened the SVG Dev Dummies to use a dummy, and I found 50 wafers
in there. Almost every slot had two wafers, and many had three wafers
per slot. So of course, I went to check the SVG Coater Dummies, and
that box was empty. I can't believe someone used an entire cassette of
coater dummies, and then decided to squeeze them all into the dev
Anyway, I cleaned them all and redistributed them to the dev and coater
You really should have seen it. Quite amazing. And I thought I had seen
More information about the svgcoat