From mahnaz at stanford.edu  Mon Jan  5 22:18:32 2009
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Mon, 05 Jan 2009 22:18:32 -0800
Subject: changes
Message-ID: <4962F7B8.1010507@stanford.edu>


Hello all

Please note that the *I line resist  Shipley 955 has been moved  from 
svgcoat to svgcoat 2,* in hope of eliminating the residue and particles 
that caused by 220-7 resist when many user did not need the EBR.

*Resist 3617 m for glass and quartz has been moved to front track* ( had 
no where else to Go but front track).

We have updated all the documentation for all the changes ( thanks to 
Uli)  please take a few minutes and familiar yourself to changes.

mahnaz



From gsosa at stanford.edu  Mon Jan 12 15:47:46 2009
From: gsosa at stanford.edu (Gary J Sosa)
Date: Mon, 12 Jan 2009 15:47:46 -0800 (PST)
Subject: Cybor controller update 1/12
In-Reply-To: <651283641.475461231804010104.JavaMail.root@zm08.stanford.edu>
Message-ID: <1666809371.500041231804066149.JavaMail.root@zm08.stanford.edu>

Hi All..

  The repairs to the Cypor pump controller are completed and the controller will be shipped back to us from Texas tomorrow(1/13). I expect to recieve and install the controller on Wednesday( 1/14). This controller controls the 220-7 pump on SVG #1 and the 220-3 pump on SVG #2. Please check Coral for updates.

  ..Gary


From gsosa at stanford.edu  Fri Jan 16 11:59:45 2009
From: gsosa at stanford.edu (Gary J Sosa)
Date: Fri, 16 Jan 2009 11:59:45 -0800 (PST)
Subject: Thick resist status
Message-ID: <1677379532.2331431232135985924.JavaMail.root@zm08.stanford.edu>

Hi All..

  The thick resist programs on SVG coat #1 and SVG coat #2 are back up. Here are the thickness test results.

   SVG Coater #1, Resist SPR 220-7
   Target thickness: 7.0 Microns
   Mean ( 5 points): 74363 A
   Std Dev: 64 A


   SVG Coater #2, Resist SPR 223-3
   Target thickness: 3.0 Microns
   Mean ( 5 Points ): 30250 A
   Std Dev: 43 A

  Regards.. Gary


From gsosa at stanford.edu  Thu Jan 29 11:10:16 2009
From: gsosa at stanford.edu (Gary J Sosa)
Date: Thu, 29 Jan 2009 11:10:16 -0800 (PST)
Subject: Vapor Pime on SVG Coat track #1
In-Reply-To: <539170857.4811451233256114163.JavaMail.root@zm08.stanford.edu>
Message-ID: <1668248639.4811711233256216715.JavaMail.root@zm08.stanford.edu>

Hi All....

  The vapor prime module on SVG track #1 has  been permanently decommisioned. Please do not be alarmed when you see that the bake cap is no longer there. We removed it as part of the de-activation. In addition, the HMDS supply cannister is  completely disconnected to prevent the possibility of an accidental discharge, all vapor prime related recipes are deactivated in recipe manager, and the hotplate temperature will be ramped down to a safe temperature. Please let me know if you have any questions or concerns.

  ...Gary