From mahnaz at stanford.edu  Fri Oct 15 10:56:16 2010
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Fri, 15 Oct 2010 10:56:16 -0700
Subject: 7 um update
Message-ID: <4CB895C0.9060302@stanford.edu>


Hello all,


Gary and Mario did some final adjustment yesterday, like the exhaust 
line is not blocked, the tip was slightly pulled back and few other 
things...
  So this morning I cleaned the nozzle with acetone, ran 4 dummies and 
every time cleaned the tip before the dispense with dry q-tip.
Do not look good. the uniformity / thickness in the middle and 25% of 
the wafer is out. The edges still shows the speed boat like around the 
edges.
Measured the thickness and in the nonuniform  area reads   4.1 um.

the rest of the wafer read at 67527, 69678,65228,65470,65133A


I do have to say that Gary and Mario have practically changed everything 
pump, valves, lines....
I will spend some serious time next week on the track and if not 
successful, I will bring the vendor to take a look at it.


mahnaz