From jaypark at stanford.edu  Tue Jan  4 16:36:24 2011
From: jaypark at stanford.edu (Jason Matthew Parker)
Date: Tue, 4 Jan 2011 16:36:24 -0800 (PST)
Subject: [Svgcoat] Coral thickness plotting in 2011
Message-ID: <327592845.157663.1294187784942.JavaMail.root@zm08.stanford.edu>

Dear svgcoat users,

Late in 2010, SNF staff implemented a way to view svgcoat process qualification data in Coral.

If you are interested in checking this data now as the lab comes back up or in the future, please review the "Process Monitoring" section of the coat tracks on the Wiki:

"https://snf.stanford.edu/SNF/equipment/optical-photolithography/resist-coat/svg-resist-coat-tracks-1-2/copy_of_SVG%20Coat%20Tracks"

Note this is newly implemented and data from 2010 will not all be online. The intent is to have the the values updated biweekly at a minimum and weekly if all goes smoothly. The usual Excel process monitoring tables will continue to exist in the in-lab binder and uploaded as described in the Wiki.

In case you don't want to use the Wiki link above, the cliff notes version of plotting these results is:
(1) select a coat track,
(2) select "Process Actions" (3rd tab) and "Display run data,"
(3) choose "Qualification."

Please contact the litho team if you have feedback or suggestions if there's a way this could better suit your needs.

-Litho team


From mahnaz at stanford.edu  Thu Jan  6 16:14:28 2011
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Thu, 06 Jan 2011 16:14:28 -0800
Subject: up date from Gary
Message-ID: <4D265AE4.2040100@stanford.edu>

hello all,

SVG Coat 1- Computer failure on 12/30/2010 related to harddisk. Removed computer so IT Group could evaluate and repair. Diagnosis was a bad boot sector on harddisk. After boot sector repair, harddisk better but still slow to respond. Next course of action was to  1: Mirror the harddisk, 2: Install new harddisk and 3: Re-install mirror onto new harddisk. As of this writing, IT Group finishing up with some computer upgrades and a final system scan overnight. Computer will be returned tomorrow between 7:00 - 8:00AM. Computer will be re-installed and tested with track. Will verify track operation and qualify 3612, 220-7 and 220-3 thickness. Will also complete recipe creation for 220-3 program variations. Estimated return to service: 1/7, early afternoon.

    ... Gary