From kevhuang at snf.stanford.edu Wed Dec 6 12:50:28 2006 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Wed, 6 Dec 2006 12:50:28 -0800 Subject: Problem svgcoat2 SNF 2006-12-06 12:50:27: wafer not centered Message-ID: EBR is off to one side for about 1 mm From vilanova at snf.stanford.edu Wed Dec 6 14:05:34 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 6 Dec 2006 14:05:34 -0800 Subject: Problem svgcoat2 SNF 2006-12-06 12:50:27: wafer not centered Message-ID: adjusted wafer centering tabs, cycled wafers , 2mm EBR wafers ok, ready to use. From kimsangb at snf.stanford.edu Wed Dec 6 17:45:05 2006 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Wed, 6 Dec 2006 17:45:05 -0800 Subject: Comment svgcoat2 SNF 2006-12-06 17:45:04: Wafer is not well centered on the spinner. Message-ID: From vilanova at snf.stanford.edu Thu Dec 7 09:45:42 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 7 Dec 2006 09:45:42 -0800 Subject: Comment svgcoat2 SNF 2006-12-06 17:45:04: Wafer is not well centered on the spinner. Message-ID: A pulley was out of position making the transfer belt to move the wafer out of position before it goes on the chuck , I adjusted the pulley and everything Looks fine now. From nvgirish at snf.stanford.edu Thu Dec 7 12:35:53 2006 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Thu, 7 Dec 2006 12:35:53 -0800 Subject: Problem svgcoat2 SNF 2006-12-07 12:35:52: EBR not working. Message-ID: From vilanova at snf.stanford.edu Thu Dec 7 12:59:55 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 7 Dec 2006 12:59:55 -0800 Subject: Problem svgcoat2 SNF 2006-12-07 12:35:52: EBR not working. Message-ID: SOmeone Had turned Off the EBR from the main canister ( the valve was showing 0 PSI ) I adjusted Valve, EBR working FIne. ok to use. From sjo at snf.stanford.edu Thu Dec 7 16:18:57 2006 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Thu, 7 Dec 2006 16:18:57 -0800 Subject: Problem svgcoat2 SNF 2006-12-07 16:18:56: Wafer poorly centered Message-ID: Wafer is poorly centered on chuck and starts wobbling above 2krpm, especially if two bonded wafers are used. From vilanova at snf.stanford.edu Fri Dec 8 08:26:58 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 8 Dec 2006 08:26:58 -0800 Subject: Problem svgcoat2 SNF 2006-12-07 16:18:56: Wafer poorly centered Message-ID: centrting tabs were way off the center this usually happens when users run Bonded wafers or thick metal wafers on the system I've centered the Centering flags stoppers ( AGAIN! ) Cycled wafers , ok to use. From uyoon at snf.stanford.edu Tue Dec 12 15:45:11 2006 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Tue, 12 Dec 2006 15:45:11 -0800 Subject: Comment svgcoat2 SNF 2006-12-12 15:45:10: Message-ID: wafer centering problem From vilanova at snf.stanford.edu Wed Dec 13 14:05:45 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 13 Dec 2006 14:05:45 -0800 Subject: Comment svgcoat2 SNF 2006-12-12 15:45:10: Message-ID: