From shott at snf.stanford.edu Sat Nov 4 08:28:34 2006 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 4 Nov 2006 08:28:34 -0800 Subject: Problem svgcoat2 SNF 2006-11-04 08:28:33: Moving from shutdown to problem condition. Message-ID: Based on the following message from ericp, I'm moving this equipment status from shutdown to problem. The tool still has some significant issues so please proceed very carefully and, at the very least, carefully run test wafers before doing anything else. Eric wrote: I found several problems: One of the roller bearings on the main track was out of alignment. This means that the spindle cannot reach (and seal vacuum with) the wafer when it comes up to meet. I put the bearing back on track. Also, the vacuum sensor is really in bad shape. It looks like it has been sprayed too much with solvent, and the buttons are therefore "welded" in place, and the display is crazed so it's difficult to read. It's working ok at this moment, but we should probably have a new one (or five) on order. Also, I think the chuck may have been loose on the spindle, but I don't know for sure. In any case, I re-seated it. It's still shutdown, so I can't fully test it, but in manual mode, at least it can grab a wafer, pull vacuum, spin it, dispense, and release it. I think it can safely go to yellow for further testing. From shott at snf.stanford.edu Sat Nov 4 08:29:11 2006 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 4 Nov 2006 08:29:11 -0800 Subject: Shutdown svgcoat2 SNF 2006-11-02 10:15:36: dispense are not working Message-ID: Based on the following message from ericp, I'm moving this equipment status from shutdown to problem. The tool still has some significant issues so please proceed very carefully and, at the very least, carefully run test wafers before doing anything else. Eric wrote: I found several problems: One of the roller bearings on the main track was out of alignment. This means that the spindle cannot reach (and seal vacuum with) the wafer when it comes up to meet. I put the bearing back on track. Also, the vacuum sensor is really in bad shape. It looks like it has been sprayed too much with solvent, and the buttons are therefore "welded" in place, and the display is crazed so it's difficult to read. It's working ok at this moment, but we should probably have a new one (or five) on order. Also, I think the chuck may have been loose on the spindle, but I don't know for sure. In any case, I re-seated it. It's still shutdown, so I can't fully test it, but in manual mode, at least it can grab a wafer, pull vacuum, spin it, dispense, and release it. I think it can safely go to yellow for further testing. Thanks, John From shott at snf.stanford.edu Sat Nov 4 08:29:36 2006 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 4 Nov 2006 08:29:36 -0800 Subject: Shutdown svgcoat2 SNF 2006-11-02 10:15:55: dispense not working Message-ID: Based on the following message from ericp, I'm moving this equipment status from shutdown to problem. The tool still has some significant issues so please proceed very carefully and, at the very least, carefully run test wafers before doing anything else. Eric wrote: I found several problems: One of the roller bearings on the main track was out of alignment. This means that the spindle cannot reach (and seal vacuum with) the wafer when it comes up to meet. I put the bearing back on track. Also, the vacuum sensor is really in bad shape. It looks like it has been sprayed too much with solvent, and the buttons are therefore "welded" in place, and the display is crazed so it's difficult to read. It's working ok at this moment, but we should probably have a new one (or five) on order. Also, I think the chuck may have been loose on the spindle, but I don't know for sure. In any case, I re-seated it. It's still shutdown, so I can't fully test it, but in manual mode, at least it can grab a wafer, pull vacuum, spin it, dispense, and release it. I think it can safely go to yellow for further testing. Thanks, John From ericp at snf.stanford.edu Sat Nov 4 13:15:10 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 4 Nov 2006 13:15:10 -0800 Subject: Comment svgcoat2 SNF 2006-11-04 13:15:09: testing ok (SPR3612) Message-ID: Mislam, kimsora and I have all tested the SVGCOAT2 (with SPR3612) and it seems to be working fine. From cmgas at snf.stanford.edu Sun Nov 5 11:03:57 2006 From: cmgas at snf.stanford.edu (cmgas at snf.stanford.edu) Date: Sun, 5 Nov 2006 11:03:57 -0800 Subject: Problem svgcoat2 SNF 2006-11-05 11:03:56: coating prgm #2 doesn't bring wafer down to pour SPR on Message-ID: Coating program #2 is stuck and cannot take the wafer down. Probably a suction program as ericp was saying. From ericp at snf.stanford.edu Sun Nov 5 16:29:00 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 5 Nov 2006 16:29:00 -0800 Subject: Comment svgcoat2 SNF 2006-11-05 16:29:00: runs ok Message-ID: vacuum sensor seems flakey. It's working ok once again. From vilanova at snf.stanford.edu Mon Nov 6 15:02:40 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Nov 2006 15:02:40 -0800 Subject: Comment svgcoat2 SNF 2006-11-03 21:09:51: Track working, at least on prg#2. Message-ID: adjusted centering tabs and dispense rate for all the coater programs, Adjusted and added EBR to canister, cycled wafers , ok to use. From vilanova at snf.stanford.edu Mon Nov 6 15:03:35 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Nov 2006 15:03:35 -0800 Subject: Problem svgcoat2 SNF 2006-11-04 08:28:33: Moving from shutdown to problem condition. Message-ID: Cleared problem , please read previous message. From vilanova at snf.stanford.edu Mon Nov 6 15:04:11 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Nov 2006 15:04:11 -0800 Subject: Comment svgcoat2 SNF 2006-11-04 13:15:09: testing ok (SPR3612) Message-ID: cleared comment , all dispenses are working fine now. From vilanova at snf.stanford.edu Mon Nov 6 15:04:59 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Nov 2006 15:04:59 -0800 Subject: Problem svgcoat2 SNF 2006-11-05 11:03:56: coating prgm #2 doesn't bring wafer down to pour SPR on Message-ID: Adjusted the Air sensor Arms , cycled it a few times, ok to use. From vilanova at snf.stanford.edu Mon Nov 6 15:05:16 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Nov 2006 15:05:16 -0800 Subject: Comment svgcoat2 SNF 2006-11-05 16:29:00: runs ok Message-ID: problem cleared. From mislam at snf.stanford.edu Tue Nov 7 11:58:45 2006 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 7 Nov 2006 11:58:45 -0800 Subject: Problem svgcoat2 SNF 2006-11-07 11:58:44: coater rail distance too narrow Message-ID: Rails on the coater module seems to be too close to each other, space won't fit wafers. Won't run wafers. From mahnaz at snf.stanford.edu Wed Nov 8 10:38:29 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 8 Nov 2006 10:38:29 -0800 Subject: Shutdown svgcoat2 SNF 2006-11-08 10:38:29: Broken belt + Message-ID: intermittent problem with openning and closing the wafer loader since last night. Mario is trying to order the part. From vilanova at snf.stanford.edu Wed Nov 8 11:11:25 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 8 Nov 2006 11:11:25 -0800 Subject: Comment svgcoat2 SNF 2006-11-08 11:11:25: I just order the parts .... Message-ID: I just order the broken part for the wafer arm carriage , hopefully will get it in tomorrow . From vilanova at snf.stanford.edu Thu Nov 9 15:37:00 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Nov 2006 15:37:00 -0800 Subject: Problem svgcoat2 SNF 2006-11-07 11:58:44: coater rail distance too narrow Message-ID: Adjusted Rail and Centering Tabs, replaced broken Pulley and vacuum defective vacuum Switch , cycled wafers, ok to use. SPECIAL THANKS TO JIM HAYDON & DICK CRANE FOR ALL THEIR HELP AND SUPPORT. From vilanova at snf.stanford.edu Thu Nov 9 15:37:23 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Nov 2006 15:37:23 -0800 Subject: Shutdown svgcoat2 SNF 2006-11-08 10:38:29: Broken belt + Message-ID: Read previous message please. From vilanova at snf.stanford.edu Thu Nov 9 15:37:38 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Nov 2006 15:37:38 -0800 Subject: Comment svgcoat2 SNF 2006-11-08 11:11:25: I just order the parts .... Message-ID: Cleared Comment. From kmla1 at snf.stanford.edu Fri Nov 10 11:34:34 2006 From: kmla1 at snf.stanford.edu (kmla1 at snf.stanford.edu) Date: Fri, 10 Nov 2006 11:34:34 -0800 Subject: Problem svgcoat2 SNF 2006-11-10 11:34:33: spinning (out of center) Message-ID: wafer is not centered correctly when it is spinned. very ugly edge bead removal. From vilanova at snf.stanford.edu Fri Nov 10 14:48:58 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 10 Nov 2006 14:48:58 -0800 Subject: Problem svgcoat2 SNF 2006-11-10 11:34:33: spinning (out of center) Message-ID: Adjusted the wafer centering Flags, Cycled wafers , ok to use. From king at snf.stanford.edu Fri Nov 10 16:14:44 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Fri, 10 Nov 2006 16:14:44 -0800 Subject: Problem svgcoat2 SNF 2006-11-10 16:14:43: wafers load off-center Message-ID: on the spinner. The PR uniformity looks OK but the edge bead removal is quite miscentered- basically none on one side and double on the other. Thanks. From vilanova at snf.stanford.edu Mon Nov 13 10:56:23 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 13 Nov 2006 10:56:23 -0800 Subject: Problem svgcoat2 SNF 2006-11-10 16:14:43: wafers load off-center Message-ID: adjusted rail arm cable , cycled 10 wafers, EBR and Uniformity looks good , ok to use, we'll keep an eye on it just to see if it gets out of position again. From kmla1 at snf.stanford.edu Mon Nov 13 11:17:10 2006 From: kmla1 at snf.stanford.edu (kmla1 at snf.stanford.edu) Date: Mon, 13 Nov 2006 11:17:10 -0800 Subject: Problem svgcoat2 SNF 2006-11-13 11:17:10: wafer stuck Message-ID: wafer keeps stuck on the track after spinning From mahnaz at snf.stanford.edu Mon Nov 13 11:29:44 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 13 Nov 2006 11:29:44 -0800 Subject: Problem svgcoat2 SNF 2006-11-13 11:17:10: wafer stuck Message-ID: The system is in Manual, I ran a wafer tested ok. From kmla1 at snf.stanford.edu Wed Nov 15 12:22:25 2006 From: kmla1 at snf.stanford.edu (kmla1 at snf.stanford.edu) Date: Wed, 15 Nov 2006 12:22:25 -0800 Subject: Problem svgcoat2 SNF 2006-11-15 12:22:24: sender problem Message-ID: it's not sending a wafer from a sender From vilanova at snf.stanford.edu Wed Nov 15 14:18:03 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 15 Nov 2006 14:18:03 -0800 Subject: Problem svgcoat2 SNF 2006-11-15 12:22:24: sender problem Message-ID: SOmeone turned power off on the hotplate , I turn it back ON tested the system , ok to use. From nvgirish at snf.stanford.edu Sun Nov 19 16:05:14 2006 From: nvgirish at snf.stanford.edu (nvgirish at snf.stanford.edu) Date: Sun, 19 Nov 2006 16:05:14 -0800 Subject: Problem svgcoat2 SNF 2006-11-19 16:05:14: PR on back side Message-ID: Prog7 has non-uniform EBR and some PR gets onto the back of the wafer. From vilanova at snf.stanford.edu Mon Nov 20 07:51:06 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Nov 2006 07:51:06 -0800 Subject: Problem svgcoat2 SNF 2006-11-19 16:05:14: PR on back side Message-ID: replaced empty resist bottle and purged line, cycled wafers no problem found, IF THE RESIST BOTTLE IS ALMOST EMPTY YOU HAVE TO REPLACE IT WITH A FRESH ONE AND PURGE THE LINE OTHERWISE YOU WILL GET A LOT OF AIR BUBBLES CAUSING A LOT OF NON UNIFORM WAFERS. From jimkruger at snf.stanford.edu Sun Nov 26 14:20:46 2006 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Sun, 26 Nov 2006 14:20:46 -0800 Subject: Problem svgcoat2 SNF 2006-11-26 14:20:46: last bottle of spr220-3 on track Message-ID: No spare 220-3 left in yellow cabinet From vilanova at snf.stanford.edu Mon Nov 27 07:53:06 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Nov 2006 07:53:06 -0800 Subject: Problem svgcoat2 SNF 2006-11-26 14:20:46: last bottle of spr220-3 on track Message-ID: there were no more chemicals in stock as of this morning 11/27/06 7:00AM , Went Outside and got some resist bottle and stock them in yellow cabinet, replaced empty Resist bottle purged line , ok to use. From huangzb at snf.stanford.edu Tue Nov 28 23:24:27 2006 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Tue, 28 Nov 2006 23:24:27 -0800 Subject: Problem svgcoat2 SNF 2006-11-28 23:24:27: EBR asymmetric Message-ID: EBR is asymmetric for program 8 1.6um 2mm EBR From vilanova at snf.stanford.edu Wed Nov 29 08:14:57 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 29 Nov 2006 08:14:57 -0800 Subject: Problem svgcoat2 SNF 2006-11-28 23:24:27: EBR asymmetric Message-ID: Cycled wafers Using Program # 8 , I couldnt repeat the User problem EBR Looks Good , ok to use.