Problem svgcoat2 SNF 2006-11-05 11:03:56: coating prgm #2 doesn't bring wafer down to pour SPR on

cmgas at snf.stanford.edu cmgas at snf.stanford.edu
Sun Nov 5 11:03:57 PST 2006


Coating program #2 is stuck and cannot take the wafer down. Probably a suction program as ericp was saying.




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