Comment svgcoat2 SNF 2006-11-05 16:29:00: runs ok
ericp at snf.stanford.edu
ericp at snf.stanford.edu
Sun Nov 5 16:29:00 PST 2006
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Problem svgcoat2 SNF 2006-11-05 11:03:56: coating prgm #2 doesn't bring wafer down to pour SPR on
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Comment svgcoat2 SNF 2006-11-05 16:29:00: runs ok
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vacuum sensor seems flakey. It's working ok once again.
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Problem svgcoat2 SNF 2006-11-05 11:03:56: coating prgm #2 doesn't bring wafer down to pour SPR on
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Comment svgcoat2 SNF 2006-11-05 16:29:00: runs ok
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