Problem svgcoat2 SNF 2006-11-05 11:03:56: coating prgm #2 doesn't bring wafer down to pour SPR on

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Nov 6 15:04:59 PST 2006


Adjusted the Air sensor Arms , cycled it a few times, ok to use. 




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