Problem svgcoat2 SNF 2006-11-07 11:58:44: coater rail distance too narrow

mislam at snf.stanford.edu mislam at snf.stanford.edu
Tue Nov 7 11:58:45 PST 2006


Rails on the coater module seems to be too close to 
each other, space won't fit wafers.
Won't run wafers.




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