Problem svgcoat2 SNF 2006-11-07 11:58:44: coater rail distance too narrow
mislam at snf.stanford.edu
mislam at snf.stanford.edu
Tue Nov 7 11:58:45 PST 2006
Rails on the coater module seems to be too close to
each other, space won't fit wafers.
Won't run wafers.
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