Shutdown svgcoat2 SNF 2006-11-08 10:38:29: Broken belt +

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Wed Nov 8 10:38:29 PST 2006


intermittent problem with openning and closing the wafer
 loader  since last night. Mario is trying to order the part.




More information about the svgcoat2-pcs mailing list