Problem svgcoat2 SNF 2006-11-07 11:58:44: coater rail distance too narrow

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Nov 9 15:37:00 PST 2006


Adjusted Rail and Centering Tabs, replaced broken Pulley 
and vacuum  defective vacuum Switch , cycled wafers, ok to 
use.
SPECIAL THANKS TO  JIM HAYDON & DICK CRANE FOR ALL
THEIR HELP AND SUPPORT. 




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