Problem svgcoat2 SNF 2006-11-10 16:14:43: wafers load off-center

king at snf.stanford.edu king at snf.stanford.edu
Fri Nov 10 16:14:44 PST 2006


on the spinner.  The PR uniformity looks OK but the edge bead removal is quite miscentered-  basically none on one side and double on the other.  Thanks.




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