Problem svgcoat2 SNF 2006-11-10 16:14:43: wafers load off-center
king at snf.stanford.edu
king at snf.stanford.edu
Fri Nov 10 16:14:44 PST 2006
on the spinner. The PR uniformity looks OK but the edge bead removal is quite miscentered- basically none on one side and double on the other. Thanks.
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