Problem svgcoat2 SNF 2006-11-10 16:14:43: wafers load off-center

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Nov 13 10:56:23 PST 2006


adjusted rail arm cable , cycled 10 wafers, EBR and Uniformity looks good , ok to use, we'll keep an eye on it  just to see
if it gets out of position again. 




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