Problem svgcoat2 SNF 2006-11-13 11:17:10: wafer stuck
kmla1 at snf.stanford.edu
kmla1 at snf.stanford.edu
Mon Nov 13 11:17:10 PST 2006
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Problem svgcoat2 SNF 2006-11-10 16:14:43: wafers load off-center
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Problem svgcoat2 SNF 2006-11-13 11:17:10: wafer stuck
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wafer keeps stuck on the track after spinning
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Problem svgcoat2 SNF 2006-11-10 16:14:43: wafers load off-center
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Problem svgcoat2 SNF 2006-11-13 11:17:10: wafer stuck
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