Problem svgcoat2 SNF 2006-11-19 16:05:14: PR on back side

[vilanova at snf.stanford.edu]

replaced empty resist bottle and purged line, cycled wafers
no problem found, IF THE RESIST BOTTLE IS ALMOST 
EMPTY YOU HAVE TO REPLACE IT WITH A FRESH ONE AND PURGE THE LINE OTHERWISE YOU WILL GET A LOT OF
AIR BUBBLES CAUSING A LOT OF NON UNIFORM WAFERS.