Problem svgcoat2 SNF 2006-11-19 16:05:14: PR on back side

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Nov 20 07:51:06 PST 2006


replaced empty resist bottle and purged line, cycled wafers
no problem found, IF THE RESIST BOTTLE IS ALMOST 
EMPTY YOU HAVE TO REPLACE IT WITH A FRESH ONE AND PURGE THE LINE OTHERWISE YOU WILL GET A LOT OF
AIR BUBBLES CAUSING A LOT OF NON UNIFORM WAFERS. 




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