From lindaw at snf.stanford.edu Sun Apr 1 16:31:02 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 1 Apr 2007 16:31:02 -0700 Subject: Problem svgcoat2 SNF 2007-04-01 16:31:01: 3612 dispenser dripping on wafer during spin Message-ID: From vilanova at snf.stanford.edu Mon Apr 2 07:13:47 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 Apr 2007 07:13:47 -0700 Subject: Problem svgcoat2 SNF 2007-04-01 16:31:01: 3612 dispenser dripping on wafer during spin Message-ID: Purged line , cleaned nozzle , cycled wafers , I dont see any drips on the wafers , tested a few times, ok to use. From sujaybr at snf.stanford.edu Tue Apr 3 01:11:41 2007 From: sujaybr at snf.stanford.edu (sujaybr at snf.stanford.edu) Date: Tue, 3 Apr 2007 01:11:41 -0700 Subject: Problem svgcoat2 SNF 2007-04-03 01:11:41: starting Message-ID: the coater did not start From vilanova at snf.stanford.edu Tue Apr 3 07:30:19 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 Apr 2007 07:30:19 -0700 Subject: Problem svgcoat2 SNF 2007-04-03 01:11:41: starting Message-ID: Operator error. Cycled wafers , System running Perfectly fine, ok to use. From ndhuang at snf.stanford.edu Tue Apr 10 14:11:12 2007 From: ndhuang at snf.stanford.edu (ndhuang at snf.stanford.edu) Date: Tue, 10 Apr 2007 14:11:12 -0700 Subject: Problem svgcoat2 SNF 2007-04-10 14:11:12: transportation not working Message-ID: From vilanova at snf.stanford.edu Tue Apr 10 14:15:16 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 10 Apr 2007 14:15:16 -0700 Subject: Problem svgcoat2 SNF 2007-04-10 14:11:12: transportation not working Message-ID: the chuck was waiting for a wafer and there was no wafer on it I pressed wafer lostso the next wafer could go in , system ok Cycling wafers normally. From ytcheng at snf.stanford.edu Sat Apr 14 09:43:11 2007 From: ytcheng at snf.stanford.edu (ytcheng at snf.stanford.edu) Date: Sat, 14 Apr 2007 09:43:11 -0700 Subject: Problem svgcoat2 SNF 2007-04-14 09:43:11: A dummy wafer is stuck on the hot plate Message-ID: A dummy wafer is stuck on the hot plate, and I can't remove it. From ytcheng at snf.stanford.edu Sat Apr 14 10:06:43 2007 From: ytcheng at snf.stanford.edu (ytcheng at snf.stanford.edu) Date: Sat, 14 Apr 2007 10:06:43 -0700 Subject: Shutdown svgcoat2 SNF 2007-04-14 10:06:43: Wafer stuck on prime oven and hot plate Message-ID: Wafers are stuck on prime oven and hot plate, and cannot be removed. From vilanova at snf.stanford.edu Mon Apr 16 07:00:28 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 16 Apr 2007 07:00:28 -0700 Subject: Shutdown svgcoat2 SNF 2007-04-14 10:06:43: Wafer stuck on prime oven and hot plate Message-ID: User ran wafer upside down ,. removed wafer, cleaned resist residues from hotplate , cycled wafers , ready to use. From vilanova at snf.stanford.edu Mon Apr 16 07:00:47 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 16 Apr 2007 07:00:47 -0700 Subject: Problem svgcoat2 SNF 2007-04-14 09:43:11: A dummy wafer is stuck on the hot plate Message-ID: Please read previous message. From vilanova at snf.stanford.edu Tue Apr 24 07:35:09 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 24 Apr 2007 07:35:09 -0700 Subject: Problem svgcoat2 SNF 2007-04-24 07:35:08: working on defective EBR dispense Message-ID: From vilanova at snf.stanford.edu Wed Apr 25 06:57:55 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 25 Apr 2007 06:57:55 -0700 Subject: Comment svgcoat2 SNF 2007-04-25 06:57:55: Waiting for defective EBR valve to arrive. Message-ID: Waiting for EBR valve to arrive , should be in today 4/25/07 From ericp at snf.stanford.edu Wed Apr 25 20:04:46 2007 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Wed, 25 Apr 2007 20:04:46 -0700 Subject: Problem svgcoat2 SNF 2007-04-25 20:04:46: Disconnected EBR- bad smell in litho Message-ID: Mohammed alerted me to a bad smell near the coater (and most of litho). I think I've traced this to track 2 EBR. I've disconnected track 2 EBR at the canister outlet. I'm waiting for the air to clear to see if that's indeed the source. From vilanova at snf.stanford.edu Thu Apr 26 08:30:55 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 26 Apr 2007 08:30:55 -0700 Subject: Problem svgcoat2 SNF 2007-04-24 07:35:08: working on defective EBR dispense Message-ID: replaced broken EBR Valve , checked for Leaks , NO leaks found after cycling 7 wafers , System Ok to use. From vilanova at snf.stanford.edu Thu Apr 26 08:31:11 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 26 Apr 2007 08:31:11 -0700 Subject: Comment svgcoat2 SNF 2007-04-25 06:57:55: Waiting for defective EBR valve to arrive. Message-ID: Please read previous message. From vilanova at snf.stanford.edu Thu Apr 26 08:31:43 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 26 Apr 2007 08:31:43 -0700 Subject: Problem svgcoat2 SNF 2007-04-25 20:04:46: Disconnected EBR- bad smell in litho Message-ID: EBR Valve changed, System operation back to normal ok to use. From huangzb at snf.stanford.edu Sat Apr 28 00:09:04 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Sat, 28 Apr 2007 00:09:04 -0700 Subject: Problem svgcoat2 SNF 2007-04-28 00:09:03: get 1.7um for program 8 Message-ID: From jsuarez at snf.stanford.edu Mon Apr 30 10:01:45 2007 From: jsuarez at snf.stanford.edu (jsuarez at snf.stanford.edu) Date: Mon, 30 Apr 2007 10:01:45 -0700 Subject: Problem svgcoat2 SNF 2007-04-30 10:01:45: no EBR (prog 7) Message-ID: From mahnaz at snf.stanford.edu Mon Apr 30 11:03:56 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 30 Apr 2007 11:03:56 -0700 Subject: Problem svgcoat2 SNF 2007-04-28 00:09:03: get 1.7um for program 8 Message-ID: It is normal for thickness to drift +/_ few hundred A. The way the humidity and temp. jumps up and down few hundred Angstrom drift is nothing. We will test both tracks today. From gsosa at snf.stanford.edu Mon Apr 30 14:09:13 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 30 Apr 2007 14:09:13 -0700 Subject: Problem svgcoat2 SNF 2007-04-30 10:01:45: no EBR (prog 7) Message-ID: Replaced the top EBR valve. Tested EBR with program #7. All looks good.