Problem svgcoat2 SNF 2007-04-01 16:31:01: 3612 dispenser dripping on wafer during spin

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Apr 2 07:13:47 PDT 2007


Purged line , cleaned nozzle , cycled wafers , I dont see any
drips on the wafers , tested a few times, ok to use. 




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