Problem svgcoat2 SNF 2007-04-03 01:11:41: starting

sujaybr at snf.stanford.edu sujaybr at snf.stanford.edu
Tue Apr 3 01:11:41 PDT 2007

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the coater did not start

Previous message: Problem svgcoat2 SNF 2007-04-01 16:31:01: 3612 dispenser dripping on wafer during spin
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