Problem svgcoat2 SNF 2007-04-10 14:11:12: transportation not working

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Apr 10 14:15:16 PDT 2007


the chuck was waiting for a wafer and there was no wafer on it
I pressed wafer lostso the next wafer could go in , system ok
Cycling wafers normally. 




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